Design of EBIS for nanoprocesses using HCI

The design of EBIS for nanoprocess using HCI is presented. The EBIS uses commercial super-conducting magnet cooled by a closed-cycle refrigerator. We have made trajectory simulation of electron beam in 100 mA range to determine the configuration of electrodes and magnet coils appropriate to obtain h...

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Bibliographic Details
Published in:Journal of physics. Conference series 2004-01, Vol.2 (1), p.52-56
Main Authors: Sakurai, Makoto, Nakajima, Fumiharu, Fukumoto, Takunori, Nakamura, Nobuyuki, Ohtani, Shunsuke, Mashiko, Shinro
Format: Article
Language:English
Subjects:
Drift tubes
Electron beams
Magnet coils
Physics
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Summary:The design of EBIS for nanoprocess using HCI is presented. The EBIS uses commercial super-conducting magnet cooled by a closed-cycle refrigerator. We have made trajectory simulation of electron beam in 100 mA range to determine the configuration of electrodes and magnet coils appropriate to obtain high current density beam at the drift tube region.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/2/1/007