Optimizing rf Power for Preferential C≡N Bond Formation in a-CN x Thin Films Prepared by rf-PECVD Technique

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Bibliographic Details
Main Authors: Aziz, N F H, Ritikos, R, Kamal, S A A, Awang, R
Format: Conference Proceeding
Language:English
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ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/431/1/012009