Characterization of thin MoO 3 films formed by RF and DC-magnetron reactive sputtering for gas sensor applications

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Bibliographic Details
Published in:Journal of physics. Conference series 2014-05, Vol.514, p.12040
Main Authors: Yordanov, R, Boyadjiev, S, Georgieva, V, Vergov, L
Format: Article
Language:English
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ISSN:1742-6596
1742-6596
DOI:10.1088/1742-6596/514/1/012040