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The measurement of electrical properties of nanostructures with use of conductive diamond tip
The use of doped full-diamond tips in SPM to measure electrical properties with nanoscale resolution is described. The method enables to measure electrical impedance, capacity and conductivity of semiconductors. The experimental results shows a wide range of benefits in investigation and creation of...
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Published in: | Journal of physics. Conference series 2007-04, Vol.61 (1), p.730-734 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The use of doped full-diamond tips in SPM to measure electrical properties with nanoscale resolution is described. The method enables to measure electrical impedance, capacity and conductivity of semiconductors. The experimental results shows a wide range of benefits in investigation and creation of elements for micro and nano-electronics. According to multiple experiments, the characteristics of diamond tips are very stable during scanning, indenting and electrical measurements. |
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ISSN: | 1742-6596 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/61/1/146 |