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The measurement of electrical properties of nanostructures with use of conductive diamond tip

The use of doped full-diamond tips in SPM to measure electrical properties with nanoscale resolution is described. The method enables to measure electrical impedance, capacity and conductivity of semiconductors. The experimental results shows a wide range of benefits in investigation and creation of...

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Bibliographic Details
Published in:Journal of physics. Conference series 2007-04, Vol.61 (1), p.730-734
Main Authors: Soshnikov, A I, Gogolinsky, K V, Blank, V D, Reshetov, V N
Format: Article
Language:English
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Summary:The use of doped full-diamond tips in SPM to measure electrical properties with nanoscale resolution is described. The method enables to measure electrical impedance, capacity and conductivity of semiconductors. The experimental results shows a wide range of benefits in investigation and creation of elements for micro and nano-electronics. According to multiple experiments, the characteristics of diamond tips are very stable during scanning, indenting and electrical measurements.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/61/1/146