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MEMS Rotational Electret Energy Harvester for Human Motion
This paper reports the development of MEMS rotational electret energy harvester (EH) for capturing kinetic energy of human motion. Optimal design method of rotational electret EH is proposed by considering both the rate of overlapping-area-change and the parasitic capacitance. A rotational MEMS elec...
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Published in: | Journal of physics. Conference series 2015-12, Vol.660 (1), p.12052 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | This paper reports the development of MEMS rotational electret energy harvester (EH) for capturing kinetic energy of human motion. Optimal design method of rotational electret EH is proposed by considering both the rate of overlapping-area-change and the parasitic capacitance. A rotational MEMS electret EH with embedded ball bearing has been successfully developed. Up to 3.6 μW has been obtained at 1 rps rotation with an early prototype. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/660/1/012052 |