Design, Fabrication, and Testing of Silicon-integrated Li-ion Secondary Micro Batteries with Interdigital Electrodes

This paper reports the design, fabrication, and testing of silicon-integrated lithium ion secondary micro batteries with a side-by-side electrode setup. Cavities separated by narrow silicon spacers served as containments for two interdigitally arranged electrodes and were etched into -Si by wet chem...

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Bibliographic Details
Published in:Journal of physics. Conference series 2015-12, Vol.660 (1), p.12064
Main Authors: Hoeppner, K, Ferch, M, Froebe, A, Gernhardt, R, Hahn, R, Mackowiak, P, Mukhopadhyay, B, Roder, S, Saalhofen, I, Lang, K-D
Format: Article
Language:English
Subjects:
Anodes
Chemical etching
Cobalt compounds
Electrochemical analysis
Electrode materials
Electrodes
Electrolytic cells
Lithium
Lithium ions
Manganese
Microbatteries
Physics
Rechargeable batteries
Silicon
Slurries
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Summary:This paper reports the design, fabrication, and testing of silicon-integrated lithium ion secondary micro batteries with a side-by-side electrode setup. Cavities separated by narrow silicon spacers served as containments for two interdigitally arranged electrodes and were etched into -Si by wet chemical etching. The etched silicon battery containments were passivated by a layer of SiOx SixNy. Al current collectors were applied by sputtering and back etching. A volumetric micro dispenser served to fill the cavities with slurries of the active materials - lithium cobalt manganese oxide (Liy(Ni1 2Co1 5Mn3 10)O2) as the cathode and lithium titanate (Li4Ti5O12) as the anode material. Filling with electrolyte, encapsulation, and electrochemical characterization of the finished cells took place in an Ar-filled glove box. The fabricated batteries with IDE show considerably lower impedances than cells with single side by side electrodes and are capable of constant current loads up to 10 C. A linear capacity loss rate of
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/660/1/012064