High energy electron-beam irradiation effects in Si-SiO x structures

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Bibliographic Details
Published in:Journal of physics. Conference series 2016-02, Vol.682, p.12012
Main Authors: Nesheva, D, Dzhurkov, V, Šćepanović, M, Bineva, I, Manolov, E, Kaschieva, S, Nedev, N, Dmitriev, S N, Popović, Z V
Format: Article
Language:English
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ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/682/1/012012