Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

This study reports piezoelectric properties and crystallographic microstructures of aluminium nitride (AlN, wurtzite structure) thin films on 50 μm thick stainless steel foil. The transverse piezoelectric coefficient d31f and e31f of 10 pm thick AlN films were estimated as -1.42 ± 0.08 μm/V and -0.4...

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Bibliographic Details
Published in:Journal of physics. Conference series 2016-11, Vol.773 (1), p.12049
Main Authors: Moriwaki, N., Minh, L.V., Ohigashi, R., Shimada, O., Kitayoshi, H., Kuwano, H.
Format: Article
Language:English
Subjects:
Aluminum nitride
Crystal structure
Crystallography
Diffraction patterns
Electron beams
Energy harvesting
Metal foils
Microscopes
Physics
Piezoelectricity
Stainless steel
Stainless steels
Thick films
Thin films
Wurtzite
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Summary:This study reports piezoelectric properties and crystallographic microstructures of aluminium nitride (AlN, wurtzite structure) thin films on 50 μm thick stainless steel foil. The transverse piezoelectric coefficient d31f and e31f of 10 pm thick AlN films were estimated as -1.42 ± 0.08 μm/V and -0.48 ± 0.03 C/m2 from a tip displacement of the piezoelectric cantilevers. Dielectric constant s33 was measured as 10.5 ± 1.0. An electron beam diffraction pattern by a high-resolution transmission electron microscope and x-ray diffraction pattern showed that abundance ratio of the orientation such as , and of AlN crystal on stainless steel foils increased with increasing thickness.
ISSN:1742-6588
1742-6596
1742-6596
DOI:10.1088/1742-6596/773/1/012049