Hard X-ray multilayer zone plate with 25-nm outermost zone width

We have improved the performance of a previously reported multilayer zone plate by reducing its outermost zone width, using the same multilayer materials (MoSi2 and Si) and fabrication technique. The focusing performance was evaluated at the BL24XU of SPring-8 using 20-keV X-rays. The line spread fu...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2017-06, Vol.849 (1), p.12052
Main Authors: Takano, H, Sumida, K, Hirotomo, H, Koyama, T, Ichimaru, S, Ohchi, T, Takenaka, H, Kagoshima, Y
Format: Article
Language:English
Subjects:
Diffraction
Diffraction efficiency
Focal plane
Knife-edge
Line spread function
Molybdenum disilicides
Multilayers
Performance evaluation
Physics
Point spread functions
Spatial resolution
Zone plates
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have improved the performance of a previously reported multilayer zone plate by reducing its outermost zone width, using the same multilayer materials (MoSi2 and Si) and fabrication technique. The focusing performance was evaluated at the BL24XU of SPring-8 using 20-keV X-rays. The line spread function (LSF) in the focal plane was measured using a dark-field knife-edge scan method, and the point spread function was obtained from the LSF through a tomographic reconstruction principle. The spatial resolution was estimated to be 30 nm, which is in relatively good agreement with the calculated diffraction-limited value of 25 nm, while the measured diffraction efficiency of the +1st order was 24%.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/849/1/012052