Analysis of scattering loss due to sidewall roughness in slot waveguides by variation of mode effective index

Sidewall-roughness scattering loss is generally severe in slot waveguides manufactured by lithography process. A suitable model is absent for evaluating this scattering loss in slot waveguides. In this paper, basing on the mechanism of sidewall-roughness scattering, we analyze the relative extent of...

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Bibliographic Details
Published in:Journal of optics (2010) 2018-02, Vol.20 (2), p.25801
Main Authors: Wang, Yu, Kong, Mei, Xu, Yameng, Zhou, Zhiming
Format: Article
Language:English
Subjects:
scattering loss
sidewall roughness
slot waveguide
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Summary:Sidewall-roughness scattering loss is generally severe in slot waveguides manufactured by lithography process. A suitable model is absent for evaluating this scattering loss in slot waveguides. In this paper, basing on the mechanism of sidewall-roughness scattering, we analyze the relative extent of the scattering loss in slot waveguides by the variation of mode effective refractive index induced by the sidewall roughness, i.e. the derivative of the effective refractive index with respect to the width of the waveguide's high-index strips. Effects of waveguide structure on this derivative are obtained and their rationality is discussed. The characteristics of the sidewall-roughness scattering loss in slot waveguides are extrapolated. We demonstrate that this model is feasible for estimating the relative extent of the scattering loss in slot waveguides and the influence of waveguide parameters on it. In addition, referring to the same model for solid-core strip waveguides, the proportionality factor relating attenuation coefficient and the effective index derivative is provided. Comparison between calculation results and measured loss further verifies the applicability of this model to slot waveguides.
ISSN:2040-8978
2040-8986
DOI:10.1088/2040-8986/aa9f8f