Phase-shifting interference microscope with extendable field of measurement

An innovative phase-shifting interference microscope aimed at extending the field of measurement is proposed in this paper. The microscope comprises a light source module, a phase modulation module, and an interferometric module, which reconstructs the micro-structure contours of samples using the f...

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Bibliographic Details
Published in:Journal of optics (2010) 2018-04, Vol.20 (4), p.45605
Main Authors: Lin, Shyh-Tsong, Hsu, Wei-Feng, Wang, Ming-Shiang
Format: Article
Language:English
Subjects:
field of measurement
interference microscope
micro-structure contour
phase-shifting algorithm
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Summary:An innovative phase-shifting interference microscope aimed at extending the field of measurement is proposed in this paper. The microscope comprises a light source module, a phase modulation module, and an interferometric module, which reconstructs the micro-structure contours of samples using the five-step phase-shifting algorithm. This paper discusses the measurement theory and outlines the configuration, experimental setup, and experimental results obtained using the proposed interference microscope. The results confirm the efficacy of the microscope, achieving a standard deviation of 2.4 nm from a step height of 86.2 nm in multiple examinations.
ISSN:2040-8978
2040-8986
DOI:10.1088/2040-8986/aab02a