Noise robustness of interferometric surface topography evaluation methods. Correlogram correlation

Different surface height estimation methods are differently affected by interferometric noise. From a theoretical analysis we obtain height variance estimators for the methods. The estimations allow us to rigorously compare the noise robustness of popular evaluation algorithms. The envelope methods...

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Bibliographic Details
Published in:Surface topography metrology and properties 2017-12, Vol.5 (4), p.45008
Main Authors: Kiselev, Ilia, Kiselev, Egor I, Drexel, Michael, Hauptmannl, Michael
Format: Article
Language:English
Subjects:
coherence scanning interferometry
correlogram correlation
Cramer-Rao bound
localization uncertainty
low-coherence interferometry
maximum likelihood
surface topography
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Summary:Different surface height estimation methods are differently affected by interferometric noise. From a theoretical analysis we obtain height variance estimators for the methods. The estimations allow us to rigorously compare the noise robustness of popular evaluation algorithms. The envelope methods have the highest variances and hence the lowest noise resistances. The noise robustness improves from the envelope to the phase methods, but a technique involving the correlation of correlograms is superior even to the latter. We dwell on some details of this correlogram correlation method and the range of its application.
ISSN:2051-672X
2051-672X
DOI:10.1088/2051-672X/aa9459