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Fabrication of SiO 2 microcantilever arrays for mechanical loss measurements

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Bibliographic Details
Published in:	Materials research express 2019-01, Vol.6 (4), p.45206
Main Authors:	Mariana, Shinta, Hamdana, Gerry, Dickmann, Johannes, Bertke, Maik, Michel, Christophe, Meyer, Jan, Yulianto, Nursidik, Cagnoli, Gianpietro, Peiner, Erwin, Waag, Andreas, Granata, Massimo, Kroker, Stefanie, Wasisto, Hutomo Suryo
Format:	Article
Language:	English
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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