Statistical analysis of thin films produced by random shaped clusters

The morphology and stochastic properties of thin films, grown by deposition of random shaped clusters, are investigated. Considering the geometric constraints for deposition process, the thin films are grown by using the Monte Carlo simulation method. Based on the statistical concept, the monofracta...

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Bibliographic Details
Published in:Materials research express 2019-09, Vol.6 (11), p.116406
Main Authors: Ebrahiminejad, Zh, Masoudi, S F
Format: Article
Language:English
Subjects:
fractal
height distribution
random shapes clusters
thin films
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Summary:The morphology and stochastic properties of thin films, grown by deposition of random shaped clusters, are investigated. Considering the geometric constraints for deposition process, the thin films are grown by using the Monte Carlo simulation method. Based on the statistical concept, the monofractal analysis of the porous films is evaluated. The correlation function, correlation length, fractal dimension, height distribution and the higher-order moments (skewness and kurtosis) of the surface height and power spectral density are studied. The results show nonzero skewness and deviation from the Gaussian distribution. Also, the effect of variation of the substrate and cluster size on the correlation length is studied. For large substrates, the correlation length and its dependence on cluster length increase.
ISSN:2053-1591
2053-1591
DOI:10.1088/2053-1591/ab456a