Metrology applications using off-axis digital holography microscopy

Off-axis digital holography microscopy (DHM) systems have evolved during these last two decades from research to commercial instrumentation. They are used in many research laboratories and production facilities as metrology instruments in a large variety of applications including dimensional, surfac...

Full description

Saved in:
Bibliographic Details
Published in:JPhys photonics 2021-07, Vol.3 (3), p.34016
Main Authors: Emery, Yves, Colomb, Tristan, Cuche, Etienne
Format: Article
Language:English
Subjects:
Artificial intelligence
Birefringence
Decision making
digital holography microscopy
Holography
Laboratories
MEMS
Metrology
Microscopy
oxide layers
polarization
vibrations
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Off-axis digital holography microscopy (DHM) systems have evolved during these last two decades from research to commercial instrumentation. They are used in many research laboratories and production facilities as metrology instruments in a large variety of applications including dimensional, surface topography, birefringence, oxide patterns thickness, and vibration characterization. The unique non-scanning quasi-instantaneous acquisition specificity of DHM opens new 4D metrology possibilities for observation of non-static scenes, operation in noisy environments, high throughput screening, and for providing fast feedback during manufacturing processes using artificial intelligence for decision making. These aspects are discussed and illustrated in this paper with the presentation of several applications to technical samples.
ISSN:2515-7647
2515-7647
DOI:10.1088/2515-7647/ac0957