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Electron-spectroscopic studies of the early stages of the oxidation of Si

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Bibliographic Details
Published in:Physical review. B, Condensed matter Condensed matter, 1979-04, Vol.19 (8), p.3944-3956
Main Authors: Garner, C. M., Lindau, I., Su, C. Y., Pianetta, P., Spicer, W. E.
Format: Article
Language:English
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ISSN:0163-1829
DOI:10.1103/PhysRevB.19.3944