Diffusion pathways of phosphorus atoms on silicon (001)

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Bibliographic Details
Published in:Physical review. B, Condensed matter and materials physics Condensed matter and materials physics, 2009-04, Vol.79 (16), Article 165311
Main Authors: Bennett, Jennifer M., Warschkow, Oliver, Marks, Nigel A., McKenzie, David R.
Format: Article
Language:English
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ISSN:1098-0121
1550-235X
DOI:10.1103/PhysRevB.79.165311