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Kinetics of Initial Layer-by-Layer Oxidation of Si(001) Surfaces

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Bibliographic Details
Published in:Physical review letters 1998-01, Vol.80 (2), p.345-348
Main Authors: Watanabe, Heiji, Kato, Koichi, Uda, Tsuyoshi, Fujita, Ken, Ichikawa, Masakazu, Kawamura, Takaaki, Terakura, Kiyoyuki
Format: Article
Language:English
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ISSN:0031-9007
1079-7114
DOI:10.1103/PhysRevLett.80.345