X-ray reflectivity and grazing-incidence small-angle scattering studies of high-k dielectric films

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Bibliographic Details
Published in:Acta crystallographica. Section A, Foundations of crystallography Foundations of crystallography, 2008-08, Vol.64 (a1), p.C555-C555
Main Authors: Allen, A.J., Green, M.L.
Format: Article
Language:English
Online Access:Get full text
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Summary:Abstract only
ISSN:0108-7673
DOI:10.1107/S0108767308082172