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Thermoelectric energy harvester fabricated in thick-film/LTCC technology
Purpose – The purpose of this work was fabrication of a small energy harvester. Design/methodology/approach – The multilayer thermoelectric power generator based on thick-film and low temperature co-fired ceramic (LTCC) technology was fabricated. Precise paths printing method was used to fabricate A...
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Published in: | Microelectronics international 2014-08, Vol.31 (3), p.176-185 |
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Main Author: | |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Purpose
– The purpose of this work was fabrication of a small energy harvester.
Design/methodology/approach
– The multilayer thermoelectric power generator based on thick-film and low temperature co-fired ceramic (LTCC) technology was fabricated. Precise paths printing method was used to fabricate Ag/Ni and Ag/PdAg thermocouples on a number of unfired LTCC tapes. The tapes were put together to form a multilayer stack. The via holes were used to make the electrical connections between adjacent layers. Finally, the multilayer stack was fired in the appropriate thermal profile.
Findings
– It consists of 450 thermocouples and generates output voltage of about 0.45 V and output electrical power of about 0.13 mW when a temperature difference along the structure is 135°C. In the paper, individual stages of energy harvester fabrication process as well as its output parameters are presented.
Originality/value
– Miniaturized thermoelectric energy harvester based on thick-film and LTCC technology was fabricated. As materials, metal-based pastes were used. This is the first paper where multilayer thermoelectric harvester, fabricated with the aid of LTCC technology, was described. |
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ISSN: | 1356-5362 1758-812X |
DOI: | 10.1108/MI-11-2013-0077 |