Nonequilibrium volume plasma chemical processing

A review is presented of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges. The role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed. Different discharge types of (glow, corona, silent, RF, and microwave di...

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Bibliographic Details
Published in:IEEE transactions on plasma science 1991-12, Vol.19 (6), p.1063-1077
Main Authors: Eliasson, B., Kogelschatz, U.
Format: Article
Language:English
Subjects:
Chemical hazards
Chemical processes
Corona
Electrons
Exact sciences and technology
Large-scale systems
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma chemistry
Plasma devices
Plasma materials processing
Production
Radio frequency
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Summary:A review is presented of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges. The role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed. Different discharge types of (glow, corona, silent, RF, and microwave discharges) are investigated with respect to their suitability for plasma processing. Emphasis is placed on the requirements of initiating and maintaining the discharge and, at the same time, optimizing plasma parameters for the desired chemical process. Using large-scale industrial ozone production as an example, the detailed process of discharge optimization is described. Other applications of volume plasma processing include other plasma chemical syntheses as well as decomposition processes such as flue gas treatment and hazardous waste disposal. The author only deals with plasmas which are not in equilibrium.< >
ISSN:0093-3813
1939-9375
DOI:10.1109/27.125031