Modeling an inductively coupled plasma reactor with chlorine chemistry

Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed in recent years. We present results from a two-dimensional (2-D) time-dependent fluid model of a chlorine plasma discharge. The steady-state values for the plasm...

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Bibliographic Details
Published in:IEEE transactions on plasma science 1996-02, Vol.24 (1), p.123-124
Main Authors: Vitello, P., Bardsley, J.N., DiPeso, G., Parker, G.J.
Format: Article
Language:English
Subjects:
Coupling circuits
Etching
Exact sciences and technology
Inductors
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma chemistry
Plasma devices
Plasma materials processing
Plasma production and heating
Plasma simulation
Plasma sources
Poisson equations
Steady-state
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Summary:Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed in recent years. We present results from a two-dimensional (2-D) time-dependent fluid model of a chlorine plasma discharge. The steady-state values for the plasma potential, and the ion fluxes for Cl/sub 2//sup +/ and Cl/sup -/ are shown for a simulation of the Lawrence Livermore National Laboratory (LLNL) large area inductively coupled reactor experiment. The counter streaming of positive and negative ions is evident. The flux of Cl/sub 2//sup +/ is highly uniform over the lower surface of the reactor.
ISSN:0093-3813
1939-9375
DOI:10.1109/27.491743