An efficient Monte Carlo simulator for low-pressure RF plasmas

An efficient, self-consistent particle-in-cell/Monte Carlo (PIC/MC) plasma simulator has been developed. The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight. This splitting tech...

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Bibliographic Details
Published in:IEEE transactions on plasma science 1997-10, Vol.25 (5), p.1081-1085
Main Authors: Ardehali, M., Matsumoto, H.
Format: Article
Language:English
Subjects:
Circuit simulation
Distribution functions
Electric discharges
Electrodes
Electrons
Exact sciences and technology
Instruments
Monte Carlo methods
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma
Plasma interactions (nonlaser)
Plasma materials processing
Plasma sheaths
Plasma simulation
Plasma-wall interactions
boundary layer effects
Plasma-wall interactions
boundary layer effects
plasma sheaths
Radio frequency
Sampling methods
Simulation
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Description
Summary:An efficient, self-consistent particle-in-cell/Monte Carlo (PIC/MC) plasma simulator has been developed. The simulator features an effective method to increase the number of MC particles belonging to the sheath by splitting the particles and by adjusting their statistical weight. This splitting technique leads to substantial reduction of statistical noise within the sheath. The simulator has been used to model a radio frequency (RF) plasma at a pressure of 20 mTorr. The results of this simulator are compared with the results of the standard PIC/MC simulator.
ISSN:0093-3813
1939-9375
DOI:10.1109/27.649629