Science and applications of energy beam ablation

This article reviews the advances in the science and applications of energy beam ablation of materials at the University of Michigan. Types of energy beams applied to materials ablation are: excimer lasers, laser-ablation-assisted plasma discharges, and channelspark electron beams. The characteristi...

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Bibliographic Details
Published in:IEEE transactions on plasma science 1999-02, Vol.27 (1), p.150-158
Main Authors: Gilgenbach, R.M., Kovaleski, S.D., Lash, J.S., Ang, L.-K., Lau, Y.Y.
Format: Article
Language:English
Subjects:
Ablation
Beams (radiation)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Deposition
Electron and ion emission by liquids and solids
impact phenomena
Electron beams
Energy
Exact sciences and technology
Excimer lasers
Impact phenomena (including electron spectra and sputtering)
Ionization
Laser ablation
Laser beams
Laser theory
Laser-beam impact phenomena
Laser-plasma interactions
Lasers
Optical materials
Particle beams
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma
Plasma applications
Plasma materials processing
Plasma production and heating
Plasma production and heating by laser beams
Plasma properties
Plasma sources
Plumes
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Summary:This article reviews the advances in the science and applications of energy beam ablation of materials at the University of Michigan. Types of energy beams applied to materials ablation are: excimer lasers, laser-ablation-assisted plasma discharges, and channelspark electron beams. The characteristics of the ablation plasma plumes generated by these energy deposition sources are discussed and compared. Plume expansion velocities are in the range of cm//spl mu/s for all three types of ablation plumes. Electron beam ablation plumes show higher ionization states than laser ablation plumes.
ISSN:0093-3813
1939-9375
DOI:10.1109/27.763103