AFM observation of surface acoustic waves emitted from single symmetric SAW transducers

We report the first experimental observation of surface acoustic waves (SAWs) launched from a single symmetric SAW transducer, employing scanning acoustic force microscopy (SAFM). SAFM is a simple technique for the imaging of complex interdigital transducer (IDT) radiation patterns with nanometer la...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2001-05, Vol.48 (3), p.641-642
Main Authors: Hesjedal, T., Behme, G.
Format: Article
Language:English
Subjects:
Acoustic emission
Acoustic imaging
Acoustic instruments, equipment, and techniques
Acoustic microscopy
Acoustic transducers
Acoustic waves
Acoustical measurements and instrumentation
Acoustics
Applied sciences
Atomic force microscopy
Electronics
Exact sciences and technology
Ferroelectric materials
Fundamental areas of phenomenology (including applications)
Gallium arsenide
General equipment and techniques
High-resolution imaging
Image resolution
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interdigital transducers
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Microscopy
Physics
Sawing machines
Scanning
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface acoustic waves
Transducers
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Summary:We report the first experimental observation of surface acoustic waves (SAWs) launched from a single symmetric SAW transducer, employing scanning acoustic force microscopy (SAFM). SAFM is a simple technique for the imaging of complex interdigital transducer (IDT) radiation patterns with nanometer lateral resolution. We demonstrate submicron lateral resolution and high sensitivity by investigating a single excitation element on a weakly coupling substrate (GaAs), visualizing the launched wave and second-order effects.
ISSN:0885-3010
1525-8955
DOI:10.1109/58.920685