Polymer dielectrics for multichip module packaging

The polymer dielectrics used to fabricate multichip modules are discussed. Numerous relevant properties of the dielectrics are compared and contrasted. It is shown that the suitability of a specific material is highly dependent on the process chosen to fabricate the structure and the intended applic...

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Bibliographic Details
Published in:Proceedings of the IEEE 1992-12, Vol.80 (12), p.1942-1954
Main Author: Garrou, P.
Format: Article
Language:English
Subjects:
Chemical technology
Dielectric thin films
Integrated circuit interconnections
Integrated circuit packaging
Multichip modules
Polymers
Semiconductor device packaging
Substrates
Very large scale integration
Wiring
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Summary:The polymer dielectrics used to fabricate multichip modules are discussed. Numerous relevant properties of the dielectrics are compared and contrasted. It is shown that the suitability of a specific material is highly dependent on the process chosen to fabricate the structure and the intended application of the module. The material properties of the polymer dielectric must be taken into account when designing the fabrication process in order to exploit the advantages and control the disadvantages that all imperfect materials are bound to have.< >
ISSN:0018-9219
DOI:10.1109/5.192074