Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness

This computer utility extracts process data from a manufacturing statistical process control database, calculates oxidation times appropriate to recenter the thickness to the desired process mean, and inserts the values of new oxidation times directly into furnace oxidation recipes resident in the m...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 1989-05, Vol.2 (2), p.54-59
Main Authors: Guldi, R.L., Jenkins, C.D., Oamminga, G.M., Baum, T.A., Foster, T.A.
Format: Article
Language:English
Subjects:
Application software
Automatic control
Computer aided manufacturing
Data mining
Furnaces
Manufacturing automation
Manufacturing processes
Oxidation
Process control
Thickness control
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Description
Summary:This computer utility extracts process data from a manufacturing statistical process control database, calculates oxidation times appropriate to recenter the thickness to the desired process mean, and inserts the values of new oxidation times directly into furnace oxidation recipes resident in the main BTU host computer so that production furnace recipes downloaded to the furnace controller automatically contain the new oxidation times. The major attributes of POTT are summarized and its application in controlling oxidation thickness for silicon integrated-circuit fabrication as well as results obtained using two different retargeting strategies are described.< >
ISSN:0894-6507
1558-2345
DOI:10.1109/66.24929