Optimizing multichamber work cell management: an application to a DRAM wafer fab

The management of a work cell consisting of multichamber systems Endura 5500 PVD is addressed with the goals of maximizing production volume and facilitating maintenance plans. These objectives are pursued through suitable system configuration and loading. A mixed integer linear programming model in...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2001-08, Vol.14 (3), p.265-272
Main Authors: Arbib, C., Iuliano, G., Da Soghe, A.
Format: Article
Language:English
Subjects:
Applied sciences
Assembly
Atherosclerosis
Computational modeling
Computer simulation
Durability
Electronics
Exact sciences and technology
Fault tolerance
Management
Microelectronic fabrication (materials and surfaces technology)
Mixed integer linear programming
Optimization
Processor scheduling
Production systems
Productivity
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
Sputtering
Steady-state
Wafers
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Description
Summary:The management of a work cell consisting of multichamber systems Endura 5500 PVD is addressed with the goals of maximizing production volume and facilitating maintenance plans. These objectives are pursued through suitable system configuration and loading. A mixed integer linear programming model incorporating such requirements as workload equalization and fault tolerance is devised to find optimal chamber assembly. The nominal productivity under distinct feasible production modes is evaluated by simulating Endura operation scheduling, and then utilized as problem input to compute nominal work cell productivity under steady-state inventory conditions. This method has been successfully adopted in an actual wafer fab to determine sputtering capacity allocation.
ISSN:0894-6507
1558-2345
DOI:10.1109/66.939826