Enhanced optical coupling performance in an InGaAs photodiode integrated with wet-etched microlens

In this letter, we report over 50% enhancement in optical coupling tolerance between a single-mode fiber and a photodiode. The enhancement is made possible by integrating a microlens on the polished backside of an InGaAs photodiode device. The microlenses are fabricated by one step wet chemical etch...

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Bibliographic Details
Published in:IEEE photonics technology letters 2002-03, Vol.14 (3), p.378-380
Main Authors: Cho, S.R., Kim, J., Oh, K.S., Yang, S.K., Baek, J.M., Jang, D.H., Kim, T.I., Jeon, H.
Format: Article
Language:English
Subjects:
Computational modeling
Hydrogen peroxide
Indium gallium arsenide
Indium gallium arsenides
Lenses
Mathematical models
Microlenses
Microoptics
Optical coupling
Optical device fabrication
Optical refraction
Photodiodes
PIN photodiodes
Polished
Scanning electron microscopy
Tolerances
Wet etching
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Summary:In this letter, we report over 50% enhancement in optical coupling tolerance between a single-mode fiber and a photodiode. The enhancement is made possible by integrating a microlens on the polished backside of an InGaAs photodiode device. The microlenses are fabricated by one step wet chemical etching in the mixed solution of bromic acid and hydrogen peroxide. Surface profiles of the microlenses are simulated using the finite-difference-method to solve a simplified diffusion model. The optical coupling tolerance is also theoretically calculated based on ray optics, of which results show an excellent agreement with the experimental data.
ISSN:1041-1135
1941-0174
DOI:10.1109/68.986819