Optical and thermal performance advantages for silicon substrates in YBCO bolometer devices

The authors review recent progress they have made in the fabrication of epitaxial YBCO thin-film bolometers (photothermal infrared detectors) on Si wafers. Infrared (IR) transmission of the Si substrates, yttria-stabilized zirconia (YSZ) buffer layers on Si, and YBCO/YSZ/Si has ben measured from the...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 1993-03, Vol.3 (1), p.2104-2106
Main Authors: Fenner, D.B., Li, Q., Hamblen, W.D., Johansson, M.E., Hamblen, D.G., Lynds, L., Budnick, J.I.
Format: Article
Language:English
Subjects:
Bolometer
infrared, submillimeter wave, microwave and radiowave receivers and detectors
Bolometers
Exact sciences and technology
Infrared detectors
Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical buffering
Optical device fabrication
Optical films
Optical sensors
Photometers, radiometers, and colorimeters
Physics
Silicon
Substrates
Thermal conductivity
Yttrium barium copper oxide
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Summary:The authors review recent progress they have made in the fabrication of epitaxial YBCO thin-film bolometers (photothermal infrared detectors) on Si wafers. Infrared (IR) transmission of the Si substrates, yttria-stabilized zirconia (YSZ) buffer layers on Si, and YBCO/YSZ/Si has ben measured from the near to the far IR at low temperatures. Si is shown to be much superior to other available choices of substrate for epitaxial-YBCO film bolometers. It is also shown, by various wafer fabrications, that the high strength and thermal conductivity of Si can be exploited to considerably reduce the device thermal-equilibration time, when irradiated with weak IR pulses, and concomitantly increase the device sensitivity. Further, the authors have fabricated monolithic quad arrays of bolometers, and found excellent element-to-element uniformity in their transitions and in their function as detectors for Fourier-transform IR spectroscopy. They have also fabricated an epitaxial YBCO-film bolometer on a submicron-thick window in a Si wafer. The rise and fall times (10-90%) were less than 500 mu s, under chopped IR illumination.< >
ISSN:1051-8223
1558-2515
DOI:10.1109/77.233441