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Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor
Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examine...
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Published in: | Journal of microelectromechanical systems 1997-06, Vol.6 (2), p.142-150 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examines an analytic model, together with two-dimensional (2-D) and three-dimensional (3-D) finite-element electrostatic torque models, of a double-stator wobble motor, to assess the trade-off between accuracy and computational efficiency, with a view to incorporate the optimum model within a dynamic simulation of a motor of this type. |
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ISSN: | 1057-7157 1941-0158 |
DOI: | 10.1109/84.585792 |