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Accuracy assessment of 2-D and 3-D finite-element models of a double-stator electrostatic wobble motor

Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examine...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 1997-06, Vol.6 (2), p.142-150
Main Authors: Sangster, A.J., Samper, V.D.
Format: Article
Language:English
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Summary:Dynamic simulation of milimeter-scale micromotors using finite-element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examines an analytic model, together with two-dimensional (2-D) and three-dimensional (3-D) finite-element electrostatic torque models, of a double-stator wobble motor, to assess the trade-off between accuracy and computational efficiency, with a view to incorporate the optimum model within a dynamic simulation of a motor of this type.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.585792