Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithogra...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 1998-06, Vol.7 (2), p.214-223
Main Authors: Samper, V.D., Sangster, A.J., Reuben, R.L., Wallrabe, U.
Format: Article
Language:English
Subjects:
Actuators
Applied sciences
Catheters
Electrical engineering. Electrical power engineering
Electrical machines
Electrostatics
Exact sciences and technology
Fabrication
Friction
Mechanical engineering. Machine design
Microactuators
Micromotors
Minimally invasive surgery
Precision engineering, watch making
Rotors
Special rotating machines
Synchronous motors
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Summary:A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.679384