Stroboscopic interferometer system for dynamic MEMS characterization

We describe a computer-controlled stroboscopic phase-shifting interferometer system for measuring out-of-plane motions and deformations of MEMS structures with nanometer accuracy. To aid rapid device characterization, our system incorporates (1) an imaging interferometer that records motion at many...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2000-12, Vol.9 (4), p.409-418
Main Authors: Hart, M.R., Conant, R.A., Lau, K.Y., Muller, R.S.
Format: Article
Language:English
Subjects:
Applied sciences
Computer control
Deformation
Devices
Dynamical systems
Dynamics
Exact sciences and technology
Image analysis
Image sequence analysis
Imaging systems
Interferometers
Measurement units
Mechanical engineering. Machine design
Mechanical variables measurement
Microelectromechanical systems
Micromechanical devices
Micrometers
Motion analysis
Motion measurement
Nanostructures
Nanotechnology
Phase measurement
Phase shifting interferometry
Precision engineering, watch making
Pulse measurements
Pulsed laser applications
R&D
Research & development
Scanning
Semiconductor lasers
Stroboscopes
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Summary:We describe a computer-controlled stroboscopic phase-shifting interferometer system for measuring out-of-plane motions and deformations of MEMS structures with nanometer accuracy. To aid rapid device characterization, our system incorporates (1) an imaging interferometer that records motion at many points simultaneously without point-by-point scanning, (2) an integrated computer-control and data-acquisition unit to automate measurement, and (3) an analysis package that generates sequences of time-resolved surface-height maps from the captured data. The system can generate a detailed picture of microstructure dynamics in minutes. A pulsed laser diode serves as the stroboscopic light source permitting measurement of large-amplitude motion (tens of micrometers out-of-plane) at kilohertz frequencies. The high out-of-plane sensitivity of the method makes it particularly suitable for characterizing actuated micro-optical elements for which even nanometer-scale deformations can produce substantial performance degradation. We illustrate the capabilities of the system with a study of the dynamic behavior of a polysilicon surface-micromachined scanning mirror that was fabricated in the MCNC MUMPS foundry process.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.896761