Vibration-to-electric energy conversion

• Published in: IEEE transactions on very large scale integration (VLSI) systems 2001-02, Vol.9 (1), p.64-76
• Main Authors: Meninger, S., Mur-Miranda, J.O., Amirtharajah, R., Chandrakasan, A., Lang, J.H.
• Format: Article
• Language: English
• Subjects: Applied sciences; Capacitors; CMOS integrated circuits; CMOS technology; Design. Technologies. Operation analysis. Testing; Direct power generation; Electric power generation; Electric variables control; Electronic systems; Electronics; Energy conversion; Energy use; Exact sciences and technology; Integrated circuits; Low power electronics; Mechanical variables control; Microelectromechanical systems; Micromechanical devices; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Very large scale integration; Vibration; Vibrations
• ISSN: 1063-8210; 1557-9999
• DOI: 10.1109/92.920820

A system is proposed to convert ambient mechanical vibration into electrical energy for use in powering autonomous low power electronic systems. The energy is transduced through the use of a variable capacitor. Using microelectromechanical systems (MEMS) technology, such a device has been designed for the system. A low-power controller IC has been fabricated in a 0.6-/spl mu/m CMOS process and has been tested and measured for losses. Based on the tests, the system is expected to produce 8 /spl mu/W of usable power. In addition to the fabricated programmable controller, an ultra low-power delay locked loop (DLL)-based system capable of autonomously achieving a steady-state lock to the vibration frequency is described.