A hybrid 6H-SiC temperature sensor operational from 25°C to 500°C

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Bibliographic Details
Published in:IEEE transactions on components, packaging, and manufacturing technology. Part A packaging, and manufacturing technology. Part A, 1996-09, Vol.19 (3), p.416-422
Main Authors: Casady, J.B., Dillard, W.C., Johnson, R.W., Rao, U.
Format: Article
Language:English
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ISSN:1070-9886
DOI:10.1109/95.536843