Effects of scanning and biasing circuit restructuring on the response of a large area magnetic field sensor array

A large area magnetic field sensor array (LAMSA) has been designed and fabricated with built-in redundancy to achieve higher yield. The laser-link technology is used as the restructuring tool. The sensor system response is measured and calibrated with a general regression analysis method. Using the...

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Bibliographic Details
Published in:IEEE transactions on components, packaging, and manufacturing technology. Part B, Advanced packaging packaging, and manufacturing technology. Part B, Advanced packaging, 1997-08, Vol.20 (3), p.342-348
Main Authors: Audet, Y., Chapman, G.H.
Format: Article
Language:English
Subjects:
Applied sciences
Biomedical imaging
Biomedical measurements
Biosensors
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated circuits
Laser beam cutting
Magnetic circuits
Magnetic field measurement
Magnetic sensors
Microsensors
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensor arrays
Sensor systems
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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Summary:A large area magnetic field sensor array (LAMSA) has been designed and fabricated with built-in redundancy to achieve higher yield. The laser-link technology is used as the restructuring tool. The sensor system response is measured and calibrated with a general regression analysis method. Using the same method, an algorithm to evaluate the effects of the restructuring schemes of the biasing and scanning circuits on the response is developed. From measurements taken before and after restructuring, the influence of the row and the column scanning circuits restructuring are found to be weak, provided the resistance values of the formed laser-links are low, especially in the case of the column scanning circuit. Restructuring of the cascode current mirror acting as active load has shown the close dependence of the sensor cell responses on the transistor parameters. Helped by these restructuring schemes, the initial yield of 23 tested chips of size 6/spl times/3 mm was raised from 39 to 61%.
ISSN:1070-9894
1558-3686
DOI:10.1109/96.618235