Monolithic single PMUT-on-CMOS ultrasound system with +17 dB SNR for Imaging Applications

• Published in: IEEE access 2020-01, Vol.8, p.1-1
• Main Authors: Zamora, I., Ledesma, E., Uranga, A., Barniol, N.
• Format: Article
• Language: English
• Subjects: AlN; Aluminum; Aluminum nitride; Analog circuits; Capacitance; Circuits; CMOS; CMOS-MEMS; Electrodes; III-V semiconductor materials; Micromachining; Monolithic integrated circuits; Noise; Noise levels; Noise reduction; Parasitics (electronics); piezoelectric on CMOS; piezoelectrical resonator; Piezoelectricity; PMUT; PMUT-on-CMOS; Signal to noise ratio; Transmitters; Ultrasonic imaging; Ultrasonic transducers; Ultrasound; ultrasound transducers
• ISSN: 2169-3536; 2169-3536
• DOI: 10.1109/ACCESS.2020.3013763

This paper presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminum nitride, AlN, squared device with 80 μm side that resonates at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise contribution and a clear improvement in the Signal-to Noise ratio (SNR ∼ 27 dB better) compared to a non-integrated equivalent system. A pulse-echo experiment with the single PMUT-on-CMOS for transmitting and sensing simultaneously is demonstrated, ensuring a 17.3 dB SNR, higher than the minimal necessary for accurate fingerprint images, paving the way towards a pixel sized imaging system with no need of multiple simultaneous PMUTs transmitters. Consuming only 0.3 mW and getting an input-referred noise of 3.26 mPa/√Hz at 2.4 MHz, the proposed pulse-echo system achieves a competitive noise efficient factor in comparison with the state-of-the-art.