Laser recrystallized polysilicon on SiO 2 for high performance resistors

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Bibliographic Details
Published in:IEEE electron device letters 1981-10, Vol.2 (10), p.254-256
Main Authors: Shah, R.R., Hollingsworth, D.R., Crosthwait, D.L.
Format: Article
Language:English
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ISSN:0741-3106
DOI:10.1109/EDL.1981.25423