Laser recrystallized polysilicon on SiO 2 for high performance resistors

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Published in:IEEE electron device letters 1981-10, Vol.2 (10), p.254-256
Main Authors: Shah, R.R., Hollingsworth, D.R., Crosthwait, D.L.
Format: Article
Language:English
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creator Shah, R.R.
Hollingsworth, D.R.
Crosthwait, D.L.
description
doi_str_mv 10.1109/EDL.1981.25423
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title Laser recrystallized polysilicon on SiO 2 for high performance resistors
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