Improved Output Power of GaN-based Blue LEDs by Forming Air Voids on Ar-Implanted Sapphire Substrate

This paper investigates GaN-based blue light-emitting diodes (LEDs) grown on sapphire substrates with selective-area Ar-ion implantation. The GaN-based epitaxial layers grown on the Ar-implanted sapphire substrates (Ar-ISS) exhibited selective growth and subsequent lateral growth because of differen...

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Bibliographic Details
Published in:Journal of lightwave technology 2013-04, Vol.31 (8), p.1318-1322
Main Authors: Jinn-Kong Sheu, Yu-Hsiang Yeh, Shang-Ju Tu, Ming-Lun Lee, Chen, P. C., Wei-Chih Lai
Format: Article
Language:English
Subjects:
air voids
Applied sciences
Ar-implanted sapphire
Educational institutions
Electronics
Epitaxial growth
Epitaxial layers
Exact sciences and technology
Gallium nitride
lateral growth
Light emitting diodes
Microelectronic fabrication (materials and surfaces technology)
Optoelectronic devices
Photonics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Substrates
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Summary:This paper investigates GaN-based blue light-emitting diodes (LEDs) grown on sapphire substrates with selective-area Ar-ion implantation. The GaN-based epitaxial layers grown on the Ar-implanted sapphire substrates (Ar-ISS) exhibited selective growth and subsequent lateral growth because of different lattice constants between the implantation and implantation-free regions. As a result, air voids were formed at the GaN/sapphire interface, above the implanted regions and below the active layers of LEDs. We proposed the GaN layer growth mechanisms on the Ar-ISS, and characterized the LEDs with embedded air voids at the GaN/sapphire interface. Using a 20-mA current injection, the light output of the experimental LEDs was found to be 15% greater than that of conventional LEDs. This enhancement can be attributed to the light scattering at the textured GaN/air void interfaces, which increases the probability of photons escaping from the LEDs.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2013.2247740