High-Speed Mid-Wave Infrared Uni-Traveling Carrier Photodetector With Inductive Peaked Dewar Packaging

• Published in: Journal of lightwave technology 2024-03, Vol.42 (5), p.1504-1510
• Main Authors: Shen, Zhijian, Yao, Jinshan, Huang, Jian, Dai, Zhecheng, Wang, Luyu, Liu, Fengyu, Zou, Xinbo, Peng, Bo, Liu, Weimin, Lu, Hong, Chen, Baile
• Format: Article
• Language: English
• Subjects: Absorption; Bandwidth; Bonding wires; Current density; Dark current; dewar packaging; Frequency response; High speed; InAs/GaSb type-II superlattice (T2SL); inductive peaking; mid-wave infrared high-speed photodetector; Packaging; Performance evaluation; Photometers; Quantum cascade lasers; Space communication; Superlattices; uni-traveling carrier photodiode
• ISSN: 0733-8724; 1558-2213
• DOI: 10.1109/JLT.2023.3322967

Recently, there has been a growing demand for high-speed mid-wave infrared (MWIR) photodetectors (PDs) driven by the emergence of new fields, such as free-space communication and frequency comb spectroscopy. In this study, we investigated a high-speed InAs/GaSb type-II superlattice (T2SL) MWIR uni-traveling carrier (UTC) PD with relatively low dark current and high responsivity. We also perform an inductive peaked dewar packaging on the PD to be user-friendly and allow cryogenic operation. The original on-wafer PD shows a dark current density of 54.05 A/cm 2 at 300 K, along with a responsivity exceeding 0.36 A/W at 4.5 μm and a 3-dB bandwidth of 3.83 GHz at −5 V bias. The inductive-peaked device in dewar packaging demonstrates a dark current density of 1.65×10 −5 A/cm 2 at 77 K, and a responsivity of 0.39 A/W at 4 μm, and a 3-dB bandwidth of 5.29 GHz.