Silicon micromachined hollow microneedles for transdermal liquid transport

This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2003-12, Vol.12 (6), p.855-862
Main Authors: Gardeniers, H.J.G.E., Luttge, R., Berenschot, E.J.W., de Boer, M.J., Yeshurun, S.Y., Hefetz, M., van't Oever, R., van den Berg, A.
Format: Article
Language:English
Subjects:
Anisotropic magnetoresistance
Applied sciences
Arrays
Biological and medical sciences
Curvature
Drug delivery systems
Electronics
Electrophoresis
Exact sciences and technology
Fabrication
Lithography, masks and pattern transfer
Medical sciences
Microelectronic fabrication (materials and surfaces technology)
Needles
Penetration
Radiotherapy. Instrumental treatment. Physiotherapy. Reeducation. Rehabilitation, orthophony, crenotherapy. Diet therapy and various other treatments (general aspects)
Robustness
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Shape
Silicon
Skin
Sputtering
Technology. Biomaterials. Equipments. Material. Instrumentation
Testing
Water loss
Wet etching
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Description
Summary:This paper presents a novel process for the fabrication of out-of-plane hollow microneedles in silicon. The fabrication method consists of a sequence of deep-reactive ion etching (DRIE), anisotropic wet etching and conformal thin film deposition, and allows needle shapes with different, lithography-defined tip curvature. In this study, the length of the needles varied between 150 and 350 micrometers. The widest dimension of the needle at its base was 250 /spl mu/m. Preliminary application tests of the needle arrays show that they are robust and permit skin penetration without breakage. Transdermal water loss measurements before and after microneedle skin penetration are reported. Drug delivery is increased approximately by a factor of 750 in microneedle patch applications with respect to diffusion alone. The feasibility of using the microneedle array as a blood sampler on a capillary electrophoresis chip is demonstrated.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2003.820293