Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators

This paper reports on novel polysilicon surface-micromachined one-dimensional (1-D) analog micromirror arrays fabricated using Sandia's ultraplanar multilevel MEMS technology-V (SUMMiT-V) process. Large continuous DC scan angle (23.6/spl deg/ optical) and low-operating voltage (6 V) have been a...

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Published in:Journal of microelectromechanical systems 2004-04, Vol.13 (2), p.279-289
Main Authors: Dooyoung Hah, Huang, S.T.-Y., Jui-Che Tsai, Toshiyoshi, H., Wu, M.C.
Format: Article
Language:English
Subjects:
Actuators
Arrays
Direct current
Frequency measurement
Microelectromechanical systems
Micromechanical devices
Micromirrors
Mirrors
Neural networks
Optical crosstalk
Optical surface waves
Resonant frequencies
Resonant frequency
Scanning
Switching theory
Voltage
Wavelength division multiplexing
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cited_by cdi_FETCH-LOGICAL-c353t-9642bfa9b0aacbae220aa183a0b66052c40a497b203433f5a7770e7d389fd89e3
cites cdi_FETCH-LOGICAL-c353t-9642bfa9b0aacbae220aa183a0b66052c40a497b203433f5a7770e7d389fd89e3
container_end_page 289
container_issue 2
container_start_page 279
container_title Journal of microelectromechanical systems
container_volume 13
creator Dooyoung Hah
Huang, S.T.-Y.
Jui-Che Tsai
Toshiyoshi, H.
Wu, M.C.
description This paper reports on novel polysilicon surface-micromachined one-dimensional (1-D) analog micromirror arrays fabricated using Sandia's ultraplanar multilevel MEMS technology-V (SUMMiT-V) process. Large continuous DC scan angle (23.6/spl deg/ optical) and low-operating voltage (6 V) have been achieved using vertical comb-drive actuators. The actuators and torsion springs are placed underneath the mirror (137/spl times/120 /spl mu/m/sup 2/) to achieve high fill-factor (91%). The measured resonant frequency of the mirror ranges from 3.4 to 8.1 kHz. The measured DC scanning characteristics and resonant frequencies agree well with theoretical values. The rise time is 120 /spl mu/s and the fall time is 380 /spl mu/s. The static scanning characteristics show good uniformity (
doi_str_mv 10.1109/JMEMS.2004.825314
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Large continuous DC scan angle (23.6/spl deg/ optical) and low-operating voltage (6 V) have been achieved using vertical comb-drive actuators. The actuators and torsion springs are placed underneath the mirror (137/spl times/120 /spl mu/m/sup 2/) to achieve high fill-factor (91%). The measured resonant frequency of the mirror ranges from 3.4 to 8.1 kHz. The measured DC scanning characteristics and resonant frequencies agree well with theoretical values. The rise time is 120 /spl mu/s and the fall time is 380 /spl mu/s. The static scanning characteristics show good uniformity (&lt;/spl plusmn/3.2%) for a 1 /spl times/ 10 array with a mirror pitch of 150 /spl mu/m. The mechanical crosstalk between adjacent mirrors is less than 37 dB. 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source IEEE Electronic Library (IEL) Journals
subjects Actuators
Arrays
Direct current
Frequency measurement
Microelectromechanical systems
Micromechanical devices
Micromirrors
Mirrors
Neural networks
Optical crosstalk
Optical surface waves
Resonant frequencies
Resonant frequency
Scanning
Switching theory
Voltage
Wavelength division multiplexing
title Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators
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