Wafer-Level Process for Single-Use Buckling-Film Microliter-Range Pumps

In this paper, we present the development of disposable single-use microfluidic pumps entirely based on a straightforward wafer-level fabrication scheme, which allows for precise integrated active dosing in the microliter range. To accomplish stroke-lengths needed for microliter-range applications,...

Full description

Saved in:
Bibliographic Details
Published in:Journal of microelectromechanical systems 2007-08, Vol.16 (4), p.795-801
Main Authors: Samel, B., Chretien, J., Ruifeng Yue, Griss, P., Stemme, G.
Format: Article
Language:English
Subjects:
Actuators
Bending
Costs
Dosing
Electrical engineering
Electrical engineering, electronics and photonics
Elektroteknik
Elektroteknik, elektronik och fotonik
Exact sciences and technology
Fabrication
fluidics
Fluorescence
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Laboratories
Liquids
Mechanical instruments, equipment and techniques
Microfluidics
Micromechanical devices
Micromechanical devices and systems
Micropumps
Physics
Power plants
Production
Pumps
Silicones
Standard deviation
TECHNOLOGY
TEKNIKVETENSKAP
Volume measurement
wafer-scale integration
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, we present the development of disposable single-use microfluidic pumps entirely based on a straightforward wafer-level fabrication scheme, which allows for precise integrated active dosing in the microliter range. To accomplish stroke-lengths needed for microliter-range applications, we utilize a new method of bending of a unimorph-composite-actuator film. The unimorph composite actuator consists of a temperature-sensitive silicone elastomer composite, i.e., polydimethylsiloxane, with incorporated expandable microspheres. The fabricated micropumps successfully demonstrated precise liquid-volume control, both at low and high flow rates, and show a standard deviation of 6.7% for consecutive pump experiments. Moreover, the method of fluorescent thermometry was used to measure the thermal load on liquid volumes dispensed with the micropumps. The liquid temperature reaches a maximum of 50degC during the operation. The presented fully integrated single-use micropumps are electrically controllable, do not require external means for liquid actuation, are made of low-cost materials only, and might potentially be used in drug-delivery applications.
ISSN:1057-7157
1941-0158
1941-0158
DOI:10.1109/JMEMS.2007.901642