High- Q Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners

This paper presents the modeling, design, fabrication, and measurement of microelectromechanical systems-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Q u ). Integrated electrostatically actuated thin diaphragms ar...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2010-08, Vol.19 (4), p.774-784
Main Authors: Xiaoguang Liu, Katehi, Linda P B, Chappell, William J, Peroulis, Dimitrios
Format: Article
Language:English
Subjects:
Applied sciences
Bias
Cavity resonators
Circuit properties
Drift
Electric potential
Electric, optical and optoelectronic circuits
Electromagnetic measurements
Electromagnetic modeling
Electronics
Electrostatic actuation
Electrostatic measurements
evanescent-mode cavity
Exact sciences and technology
Fabrication
Insertion loss
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectromechanical systems
microelectromechanical systems (MEMS)
Micromechanical devices and systems
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Noise levels
Physics
Q factor
Q measurement
quality factor
Resonant frequency
Resonator filters
Resonators
tunable filter
tunable resonator
Tuning
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Summary:This paper presents the modeling, design, fabrication, and measurement of microelectromechanical systems-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Q u ). Integrated electrostatically actuated thin diaphragms are used, for the first time, for tuning the frequency of the resonators/filters. An example tunable resonator with 2.6:1 (5.0-1.9 GHz) tuning ratio and Q u of 300-650 is presented. A continuously tunable two-pole filter from 3.04 to 4.71 GHz with 0.7% bandwidth and insertion loss of 3.55-2.38 dB is also shown as a technology demonstrator. Mechanical stability measurements show that the tunable resonators/filters exhibit very low frequency drift (less than 0.5% for 3 h) under constant bias voltage. This paper significantly expands upon previously reported tunable resonators.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2010.2055544