Miniature MEMS Switches for RF Applications

This paper presents a new way to design MEMS (microelectromechanical system) metal contact switches for RF applications using miniature MEMS cantilevers. A single 25 × 25 μm switch is first demonstrated with a Au-to-Ru contact, C u = 5 fF and R on = 7 Ω at an actuation voltage of 55 V. The measured...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2011-12, Vol.20 (6), p.1324-1335
Main Authors: Stefanini, R., Chatras, M., Blondy, P., Rebeiz, G. M.
Format: Article
Language:English
Subjects:
Applied sciences
Array
Circuit properties
Contact
contact resistance
Design engineering
Devices
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Micromechanical devices and systems
Microswitches
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Miniature
Physics
Radio frequencies
Radio frequency
Stress
stress control
Switches
Switching
Temperature measurement
Transmission line measurements
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Description
Summary:This paper presents a new way to design MEMS (microelectromechanical system) metal contact switches for RF applications using miniature MEMS cantilevers. A single 25 × 25 μm switch is first demonstrated with a Au-to-Ru contact, C u = 5 fF and R on = 7 Ω at an actuation voltage of 55 V. The measured switching time is 2.2 μs and the release time is
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2011.2170822