A Sub-400-nT/ \sqrt } , 775- \mu \text , Multi-Loop MEMS Magnetometer With Integrated Readout Electronics

This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2015-12, Vol.24 (6), p.1938-1950
Main Authors: Minotti, Paolo, Brenna, Stefano, Laghi, Giacomo, Bonfanti, Andrea G., Langfelder, Giacomo, Lacaita, Andrea L.
Format: Article
Language:English
Subjects:
capacitive sensing interface
Magnetic resonance
Magnetometers
Metals
Microelectromechanical systems (MEMS) sensors
Micromechanical devices
navigation
Perpendicular magnetic anisotropy
Sensitivity
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Summary:This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amplifier front-end, and designed to be balanced with the sensor in terms of noise and power consumption. The overall system, including demodulation and filtering stages, shows a programmable full-scale up to ±2.4 mT, limited by the electronics saturation. The bandwidth can be programmed up to 150 Hz for off-resonance operation where a sub-400-nT/√Hz resolution at 775-μW power consumption is obtained, including the integrated readout and the Lorentz current. Perspectives on low-consumption driving oscillators for off-resonance mode are finally given.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2015.2452316