Continuous Color Reflective Display Fabricated in Integrated MEMS-and-TFT-on-Glass Process

The single mirror interferometric MEMS display is a full-color, daylight-visible, video-rate reflective display with high brightness that consumes power only during content updates. It consists of an array of identical pixels each of which can produce a continuous range of colors through precise ana...

Full description

Saved in:
Bibliographic Details
Published in:Journal of microelectromechanical systems 2017-02, Vol.26 (1), p.143-157
Main Authors: Chan, Edward K., Chang, Tallis, Tze-Ching Fung, Hong, John, Cheonhong Kim, Jian Ma, Yaoling Pan, Shen-Ge Wang, Bing Wen
Format: Article
Language:English
Subjects:
Absorption
compound spring
contact
Display
Force
glass
IGZO
Image color analysis
integrated electronics
interferometric modulator
low power
Micromechanical devices
Mirrors
Optical interferometry
reflective
TFT
Thin film transistors
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The single mirror interferometric MEMS display is a full-color, daylight-visible, video-rate reflective display with high brightness that consumes power only during content updates. It consists of an array of identical pixels each of which can produce a continuous range of colors through precise analog positioning of one moving element, a mirror. Electrostatic actuation is driven with an integrated active-matrix backplane of indium-gallium-zinc oxide thin-film transistors. Displays of 384 × 384 pixels built on a surface micromachining process on glass substrates have been demonstrated on both 6-in wafers and Gen 4.5 panels (730 mm × 920 mm) showing good yield and uniformity.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2016.2621119