A Flush-Mounted Dual-Axis Wall Shear Stress Sensor

This paper presents the fabrication, packaging, and calibration of a flush-mounted, dual-axis, differential capacitive wall shear stress sensor. The two-mask fabrication process produces a 7-mm die with a 2-mm by 2-mm floating element supported by eight, compliant crab-leg tethers. Taking advantage...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2020-10, Vol.29 (5), p.748-754
Main Authors: Freidkes, Brett R., Mills, David A., Patterson, William C., Fournier, Philip M., Sheplak, Mark
Format: Article
Language:English
Subjects:
Acoustic plane wave tube
backside wire bonds
Calibration
capacitive transduction
Couplings
crab-leg tethers
Electrodes
Fabrication
fully-differential biasing
Resonant frequencies
Sensitivity
Shear stress
single-ended biasing
Stress
Tethers
wall shear stress
Wall shear stresses
Wind tunnel testing
Wind tunnels
Wires
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Summary:This paper presents the fabrication, packaging, and calibration of a flush-mounted, dual-axis, differential capacitive wall shear stress sensor. The two-mask fabrication process produces a 7-mm die with a 2-mm by 2-mm floating element supported by eight, compliant crab-leg tethers. Taking advantage of backside wire bonds, the hydraulically smooth package is suitable for wind tunnel testing and is designed to have a resonant frequency of 3.7 kHz. Initial dynamic calibration data are presented using both single-ended and fully-differential electronics, with sensitivities as high as 80 mV/Pa and minimum detectable wall shear stress values as low as 10~\mu Pa/Hz 1/2 , resulting in dynamic ranges near 135 dB. [2020-0175]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2020.3008471