Study of Thin Film LiNbO 3 Laterally Excited Bulk Acoustic Resonators

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2022-04, Vol.31 (2), p.217-225
Main Authors: Yandrapalli, Soumya, Eroglu, Seniz Esra Kucuk, Plessky, Victor, Atakan, H. Baris, Villanueva, Luis Guillermo
Format: Article
Language:English
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2022.3143354